We supply spare parts and consumables for CMP equipments namely AMAT and Ebara.
Consumables like- Ox slurry, polishing pad, buffing pad, diamond disks, PVA brush, retaining ring, membrane, backing film, etc.
We supply spare parts and consumables for SEZ equipments.
Spare parts like- chuck, motors, robot, etc.
Consumables like- chuck pins, ECO pins, etc.
We supply spare parts for Thin Film equipments from AMAT and Novellus.
Spare parts like- valves, gaslines, PCBs, robot, motor/ driver.
We repair various type of chemical pumps. Contact our sales for more details and quotations.